Design Features

·100 μm closed-loop and 120 μm open-loop travels (custom travels available)

·High-stiffness and dynamics resulting in outstanding step-and-settle and scanning performance

·High-precision, frictionless flexure guidance

·Long device lifetime

·Superior positioning resolution and linearity with direct-metrology capacitive sensor option

·Variety of threaded adapters for quick and easy attachment to the microscope and objective

·Clear aperture to 29 mm

Aerotech’s QFOCUS™ QF1 piezo nanopositioning stage offers microscope objective and optics positioning with nanometer-level precision at high-speeds. With an ultra-precision capacitive sensor feedback option and high structural stiffness, the QF1 is perfect for demanding scanning applications, microscopy, or any optical application requiring high precision and throughput.

Exacting Precision

The QFOCUS QF1 piezo stage is guided by precision flexures that are optimized using finite element analysis to ensure high-stiffness and long device life. The resulting design offers outstanding stiffness and resonant frequency, enabling high process throughput and fast closed-loop response. Furthermore, the QF1 has been designed to provide excellent geometric performance (straightness and angular errors) for critical microscopy and optics positioning applications.

High-Resolution and Positioning Accuracy

The QF1 has the option of closed-loop feedback (-C) using a unique capacitive sensor design that allows for sub-nanometer resolution and high linearity. The capacitive sensors measure the output of the positioning carriage directly enabling superior accuracy and repeatability.

Ultra-Precision Control

When coupled with Aerotech’s Q-series controllers and drives, the QF1 demonstrates sub-nanometer positioning resolution, in-position stability (jitter), and high-positioning bandwidth. Software options such as Aerotech’s Dynamic Controls Toolbox and Motion Designer packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times. OEM drive options are also available.

Objective Thread Adapter Variety

The QFOCUS QF1 is available with threaded adapters to fit most microsopes and objectives. The microscope turret mounting allows for the easy and fast positioning of the QF1 at the desired orientation. The QF1 is available with a clear aperture of up to 29 mm.

Custom stage designs, travels, and threaded adapters are available.

Source: Aerotech